Journal Articles

2012

Vivek Sharma, Adam Bailey, Bill Dauksher, Clarence Tracy, and Stuart Bowden Solar Power Lab, Arizona State University, Barry O’Brien, Flexible Display Center, Arizona State University, “Characterization and comparison of silicon nitride films deposited using two novel processes”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 30, issue 2, no. 021201, March/April 2012

J. Haq, B. Vogt, G. Raupp, D. Loy, “Finite Element Modeling of Temporary Bonding Systems for Flexible Microelectronics Fabrication”, Microelectronic Engineering, vol. 94, pp. 18-25, January 2012.

M. Marrs, G. Raupp, and B. Vogt, “Comparison of Wet and Dry Etching of Zinc Indium Oxide for Thin Film Transistors with an Inverted Gate Structure”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 30, issue 1, no. 011505, January 2012.